| 魏久翔,姜晨,刘剑.微槽的超声振动辅助磁性复合流体抛光工艺研究[J].上海理工大学学报,2022,44(5):457-463. |
| 微槽的超声振动辅助磁性复合流体抛光工艺研究 |
| Ultrasonic vibration-assisted magnetic compound fluid polishing of microgrooves |
| 投稿时间：2021-12-15 |
| DOI：10.13255/j.cnki.jusst.20211215002 |
| 中文关键词: 超声振动 磁性复合流体 抛光 微槽结构 工艺参数 |
| 英文关键词:ultrasonic vibration magnetic compound fluid polishing microgroove structure process parameters |
| 基金项目:国家自然科学基金资助项目（51475310） |
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| 中文摘要: |
| 针对微通道制氢反应器的微槽底部光整加工难题，开展超声振动辅助磁性复合流体(UMCF)抛光工艺研究。根据表面接触理论分析微槽底部气膜对磁性复合流体(MCF)抛光的影响，引入超声振动改善MCF抛光微槽底部的表面质量；通过试验探究UMCF抛光对微槽底部的抛光效果；研究不同参数下MCF抛光和UMCF抛光对微槽的表面形貌、表面粗糙度和去除率的变化规律，获得最佳的抛光参数。研究结果表明：当羰基铁粉粒径为48 μm，抛光时间为5 min，抛光轮转速为500 r/min，抛光间隙为2 mm，振幅为5 μm时抛光效果最佳，微槽顶部表面粗糙度Ra达到0.217 μm；槽底表面粗糙度Ra达到0.403 μm，去除率为4.74 mg/min。 |
| 英文摘要: |
| For the technical problem of microgroove bottom finishing in microchannel hydrogen production reactor, ultrasonic vibration assisted magnetic composite fluid (UMCF) polishing technology were carried out. According to the surface contact theory, the influence of gas film at the bottom of the microgrooves on the magnetic composite fluid (MCF) polishing was analyzed, and the surface quality of the bottom of the microgrooves was improved by introducing ultrasonic vibration. The effect of UMCF polishing on the bottom of microgrooves was investigated by experiments. The effects of MCF and UMCF polishing on the surface morphology, surface roughness and removal rate of the microgrooves under different parameters were obtained. The results show that at the particle size of carbonyl iron powder of 48 μm, polishing time of 5 min, polishing wheel speed of 500 r/min, polishing gap of 2 mm and amplitude of 5 μm, the polishing effect is the best. The top surface roughness of the microgrooves reaches 0.217 μm. The bottom surface roughness reaches 0.403 μm, and the removal rate is 4.74 mg/min. Experimental results provide guidance for ultrasonic vibration-assisted magnetic composite fluid polishing of microgroove structure parts. |
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