磁控溅射枪的设计与应用
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The Design and Application of the Ion Sputter Magnetron Gun
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    摘要:

    本文论述了磁控溅射枪的基本设计原理,分析确定了枪的电、磁参量和主要结构参数,并给出了枪的性能测试曲线。

    Abstract:

    The ion sputter magnetron, (developed since the middle of the 1970's,) is a new method for deposting thin films and is now enjoying great popularity in the field of optical films, decorating coatings and hard coatings. The gun includes electric, magnetic, cooling, insulating and sealing systems. In this paper, the basic design principle of the gun is dealt with, the main parameters of the gun are determined and the test curves of the properties of the gun are presented. Finally, a summary is given of the prospects for the gun and how to improve it in the future.

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凌世德,程维明.磁控溅射枪的设计与应用[J].上海理工大学学报,1986,(3).

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