Diffractive microlens arrays for 128×1 solarblind UV photodetectors were designed using scalar diffraction theory by considering the interrelated optical and process parameters.The working center wavelength is 400 nm, the lens F number is f/5. The microlens arrays were fabricated by use of combination multicoatings and stripping technique, the practical processes and fabrication errors were discussed, and the optical characteristics of 128×1 diffractive microlens arrays were measured and analyzed. Experimental results show that the diffraction efficiency of the diffractive microlens array is 87%. The fabrication errors come from the alignment error and the line width error. The overall performance of ultraviolet diffractive microlens array can meet the monolithic integration requirements of the microlens array with the ultraviolet focal plane array.