The ABAQUS impact simulation model was established to study the processing principle of solid-liquid two flow methods. The stress variation during the deformation of monocrystalline germanium materials, the impact effect at different velocity and the impact effect with different angels were studied respectively. The simulation results show that, during the process of processing, the plastic deformation forms on the surface of material by the effect of horizontal cutting force and vertical extrusion force. Under different velocity impacts, the plastic strain on the surface of material increases with the increase of speed and the max contact stress increases then decreases. Under different angle impacts, the max contact stress is affected combinedly by the anisotropic modulus of elasticity of single crystal germanium and the impact angle. The anisotropism of the elastic modulus has no effect on the material deformation. The impact angle affects the amount of material deformation and determines whether the stress concentration occurs on the material surface.