Motivated by the short evolution period as well as business & IT alignment requirement of SOA agile architectures, a hierarchical iterative modeling approach based on the open group architecture framework (TOGAF) was proposed. For outer layer iterations, an agile evolution closed loop was defined to ensure the periodical update be agilely implemented and consist with the architecture vision. For inner layer iterations, a 3-dimensional iterative modeling matrix was designed as a mechanism for the alignment of architecture models in three aspects:requirement, semantics and granularity. Furthermore, practical modeling guidelines and typical modeling process concerning the semantical alignment for business architectures, information system architectures and technical architectures based on BPM + SOA were discussed, which provides an iterative, phase delivered and business & IT aligned solution for SOA agile architectures.