Abstract:In order to improve the resolution of the super-resolution microscopic imaging system, a multi-beam super-resolution microscopic imaging system was designed and set up. The imaging system includes three laser beams: 405 nm excitation solid beam, 488 nm excitation solid beam, and 488 nm annular beam. Labview was used to control the data collection between the nano-stage and the single photon detector and 80 nm gold nanoparticle probe was used to modulate the laser beam on nanoscale. It mainly includes the light beam shaping of multi-beam, the optimization of the coincidence degree, and simulation of intensity distribution. From the test results of the green fluorescent protein sample, it illustrates by using this method, the spatial coincidence degree of beams can be improved in the system.