The circuit topology was improved based on the all-solid-state Marx generator. High-voltage DC power supply was adopted in charging. Multi-stage capacitors were integrated into one high-voltage capacitor for energy storage to reduce the number of parasitic parameters of the circuit. The DC voltage output from the capacitor was chopped to form a high-voltage pulse, and a set of truncated switches was added to quickly release the residual charge of the load and form a fast falling edge at the end of the pulse. After analyzing the characteristics of the series semiconductor switch driving circuit in detail, a series-core magnetic ring isolation driving circuit and a delay driving circuit were designed to achieve the driving requirements. Finally, a high-voltage square wave pulse output of 10 kV was achieved on a 20 kΩ resistive load.