The low-temperature plasma produced by glow discharge has broad application prospects and is increasingly becoming a research hotspot. In this paper, an experimental device for exciting glow discharges by means of pulsed superimposed DC is proposed. Argon gas is selected as the reaction gas, the experimental environment is low pressure, and the parameter adjustable high-frequency pulse power supply and DC power supply are used for excitation. The changes of breakdown voltage and current under different excitation methods are studied. The experiments results show that the breakdown voltage of DC glow discharge is the lowest, about 380 V. But the discharge tube generates a lot of heat during the discharge process. The breakdown voltage required for pulsed glow discharge is 450~600 V, while pulse superimposed DC excitation glow Discharge reduces the pulse breakdown voltage, the lowest is about 400 V, and improves the serious heating problem of the discharge tube.